A new sol-gel route to prepare dense Al 2 O 3 thin films

Published 2016 View Full Article

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Title
A new sol-gel route to prepare dense Al 2 O 3 thin films
Authors
Keywords
Sol-gel, Al, 2, O, 3, films, Spin-coating, Chelating agent
Journal
CERAMICS INTERNATIONAL
Volume 42, Issue 15, Pages 16867-16871
Publisher
Elsevier BV
Online
2016-07-28
DOI
10.1016/j.ceramint.2016.07.181

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