Gas-phase and film analysis of hydrogenated amorphous carbon films: Effect of ion bombardment energy flux on sp2 carbon structures

Published 2019 View Full Article

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Title
Gas-phase and film analysis of hydrogenated amorphous carbon films: Effect of ion bombardment energy flux on sp2 carbon structures
Authors
Keywords
Amorphous carbon, Plasma-enhanced chemical vapor deposition (PECVD), Raman spectroscopy, Near-edge X-ray absorption fine structure (NEXAFS)
Journal
DIAMOND AND RELATED MATERIALS
Volume 104, Issue -, Pages 107651
Publisher
Elsevier BV
Online
2019-12-13
DOI
10.1016/j.diamond.2019.107651

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