Study on efficiency improvement of multi-crystalline silicon solar cell by removing by-product and plasma induced damage generated during reactive ion etching

Title
Study on efficiency improvement of multi-crystalline silicon solar cell by removing by-product and plasma induced damage generated during reactive ion etching
Authors
Keywords
Solar cell, Multi-crystalline silicon wafer, RIE, Passivation, Byproduct, Plasma-induced damage
Journal
CURRENT APPLIED PHYSICS
Volume 20, Issue 4, Pages 519-524
Publisher
Elsevier BV
Online
2020-01-24
DOI
10.1016/j.cap.2020.01.013

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