Enhanced NO2 sensing properties of Pt/WO3 films grown by glancing angle deposition

Published 2020 View Full Article

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Title
Enhanced NO2 sensing properties of Pt/WO3 films grown by glancing angle deposition
Authors
Keywords
NO, 2, sensing properties, Pt/WO, 3, MEMS gas sensors, Glancing angle deposition
Journal
CERAMICS INTERNATIONAL
Volume -, Issue -, Pages -
Publisher
Elsevier BV
Online
2020-05-27
DOI
10.1016/j.ceramint.2020.05.236

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