Journal
APPLIED PHYSICS LETTERS
Volume 116, Issue 15, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/5.0006524
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Funding
- National Natural Science Foundation of China [51772005]
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Linear piezoelectric ultrasonic motors based on multimodal coupling are widely used for generating precision actuations; however, multimodal decoupling often occurs when environment temperature changes, which may result in actuation failure. In this work, a miniature, ring-shaped, linear piezoelectric ultrasonic motor operating in a single, in-plane E-01 mode (zero node line along the circumference and one node line along the diameter direction) is proposed. Experimental results show that it can produce a maximum driving force of 2.7N, a no-load moving speed of similar to 56mm/s, and a high positioning resolution of 0.1 mu m in open-loop control. Advantages of simple structure, controllable micrometer-scale displacement, and large bidirectional working stroke indicate that the proposed linear motor has great potential for industrial applications, especially for precise actuations.
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