Atomic Layer Deposition of GexSe1–x Thin Films for Endurable Ovonic Threshold Selectors with a Low Threshold Voltage

Published 2020 View Full Article

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Title
Atomic Layer Deposition of GexSe1–x Thin Films for Endurable Ovonic Threshold Selectors with a Low Threshold Voltage
Authors
Keywords
-
Journal
ACS Applied Materials & Interfaces
Volume 12, Issue 20, Pages 23110-23118
Publisher
American Chemical Society (ACS)
Online
2020-04-29
DOI
10.1021/acsami.0c03747

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