4.2 Article

Study on vibration-assisted thermal nanoimprint lithography

Journal

APPLIED NANOSCIENCE
Volume 10, Issue 8, Pages 3315-3324

Publisher

SPRINGER HEIDELBERG
DOI: 10.1007/s13204-020-01280-7

Keywords

Vibration-assisted; Thermal nanoimprint lithography; Polymethyl methacrylate (PMMA); Filling rate

Funding

  1. Joint Funds of Nation Natural Science of Foundation of China [U19A20104]
  2. Micro-Nano and Ultra Precision Key Laboratory of Jilin Province [20140622008JC]
  3. Science and Technology Development Projects of Jilin Province [20190201254JC, 20190302065GX]

Ask authors/readers for more resources

In thermal nanoimprint lithography, polymethyl methacrylate (PMMA) with good thermoplasticity is often used as transferring media. However, due to the special properties of PMMA, the accuracy of microstructure transferred to the surface will be seriously affected. To address this problem, the micro-vibration by piezo-driven is introduced in conventional thermal nanoimprint lithography. Because of the micro-vibration will change the contact stress during the embossing process and reduce the contact time. This will improve the filling rate of PMMA during the embossing process and transfer the pattern of stamp to PMMA with excellent feature fidelity. Compared with the traditional nanoimprint lithography, the filling rate of PMMA is increased by 92% after the introduction of vibration by piezo-driven. Then, a new motion model is built to verify the rationality of introducing vibration. Besides, the effect of frequency and amplitude with filling rate is analyzed by finite element method to obtain the best frequency and amplitude for experiments. Finally, the transferred pattern is observed by experiment.

Authors

I am an author on this paper
Click your name to claim this paper and add it to your profile.

Reviews

Primary Rating

4.2
Not enough ratings

Secondary Ratings

Novelty
-
Significance
-
Scientific rigor
-
Rate this paper

Recommended

Article Optics

Analysis of the influence of vibrations on the imaging quality of an integrated TDICCD aerial camera

Xiaoqin Zhou, Hao Liu, Yucheng Li, Meng Ma, Qiang Liu, JieQiong Lin

Summary: This paper studies the influence of vibrations on the imaging quality of the integrated TDICCD aerial camera and establishes mathematical models to analyze the relationship between vibration responses of structures and imaging quality. With simulation imaging and multiple tests, the accuracy of the models is verified, showing a rapid decrease in imaging quality with increasing acceleration excitation.

OPTICS EXPRESS (2021)

Article Optics

Modeling and experimental analysis on the effect of carrier aircraft vibration on the imaging quality of an aspherical aerial camera

Jieqiong Lin, Jiahang Tian, Mingming Lu, Tonghuan Ran, Jiakang Zhou

Summary: This paper establishes a mathematical model to analyze the impact of carrier aircraft vibration on the imaging quality of an aspherical aerial camera, and validates the model through simulation and experiment analysis, providing theoretical guidance for aerial camera optimization design.

OPTIK (2021)

Article Engineering, Multidisciplinary

Non-resonant vibration-assisted magnetorheological finishing

Yan Gu, Mingshuo Kang, Jieqiong Lin, Ao Liu, Bin Fu, Penghui Wan

Summary: The study introduces a vibration-assisted magnetorheological finishing method to enhance the shearing effects of polishing. Experimental results show that variations in vibration parameters affect surface quality and polishing forces, with higher amplitudes and frequencies leading to better surface quality.

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY (2021)

Article Chemistry, Analytical

Analyzing the Effect of Particle Shape on Deformation Mechanism during Cutting Simulation of SiC p/Al Composites

Jiakang Zhou, Jieqiong Lin, Mingming Lu, Xian Jing, Yubo Jin, Dunlan Song

Summary: The study found that using models with irregular polygonal particles in the cutting simulation process for metal matrix composites is closer to the actual microstructure, better reflects particle deformation behavior, and captures more details of the impact caused by particles on cutting forces.

MICROMACHINES (2021)

Article Materials Science, Composites

Prediction and Verification of Cutting Force in Machining of SiCp/Al Composites Based on Dynamic Mechanical Characteristics of Cutting Deformation Zone

Jiakang Zhou, Jieqiong Lin, Mingming Lu, Xiaoqin Zhou, Yongsheng Du, Chao Wang

Summary: This paper proposed a geometric model of cutting force to predict the cutting force and monitor the cutting state during machining of SiCp/Al composites. The validity of the model was confirmed, and the applicability of the model under different volume fractions of SiCp/Al composites was studied.

APPLIED COMPOSITE MATERIALS (2021)

Article Engineering, Industrial

Cutting deformation mechanism of SiCp/Al composites based on strain gradient theory

Yihang Fan, Yongshuo Xu, Zhaopeng Hao, Jieqiong Lin

Summary: The study shows that the presence of SiC particles changes the microstructure of the matrix material, leading to a high strain gradient in the matrix which makes the material more prone to shear deformation localization. During the cutting process, defects and breakage of SiC particles result in the formation of micro-cracks, which play a key role in chip generation. By comparing simulation and experimental results, it is found that the established theoretical model based on strain gradient better reflects the cutting process of particle-reinforced metal matrix composites.

JOURNAL OF MATERIALS PROCESSING TECHNOLOGY (2022)

Article Engineering, Manufacturing

Improved magnetorheological finishing process with arc magnet for borosilicate glass

Xulong Zhuang, Mingming Lu, Jiakang Zhou, Jieqiong Lin, Weixing Li

Summary: By optimizing the shape of the arc permanent magnet through finite element simulation, the polishing efficiency of planar optical elements can be improved, resulting in better processing quality. Experimental results demonstrate that the use of arc permanent magnets can significantly reduce surface roughness and improve surface accuracy.

MATERIALS AND MANUFACTURING PROCESSES (2022)

Article Engineering, Mechanical

Modeling and investigation of cutting force for SiCp/Al composites during ultrasonic vibration-assisted turning

Jieqiong Lin, Chao Wang, Mingming Lu, Jiakang Zhou, Shixin Zhao, Yuyang Liu

Summary: The study developed a cutting force prediction model for ultrasonic vibration-assisted turning of SiCp/Al composites, effectively reducing the difficulty of machining and improving machinability. The feasibility of ultrasonic vibration-assisted turning was verified, and systematic analysis of cutting force was conducted.

PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART E-JOURNAL OF PROCESS MECHANICAL ENGINEERING (2022)

Article Chemistry, Analytical

Piezoelectric Hysteresis Modeling of Hybrid Driven Three-Dimensional Elliptical Vibration Aided Cutting System Based on an Improved Flower Pollination Algorithm

Xifeng Fu, Hong Gong, Mingming Lu, Jiakang Zhou, Jieqiong Lin, Yongsheng Du, Ruiqi Zhou

Summary: This study proposed a piezoelectric hysteresis modeling method based on a generalized Bouc-Wen model, and used an improved flower pollination algorithm (IFPASO) to identify model parameters. Experimental results showed that the model identified by IFPASO had high modeling accuracy, effectively describing the piezoelectric hysteresis characteristics of the 3D-EVC system.

MICROMACHINES (2021)

Article Chemistry, Multidisciplinary

Wettability and Droplet Directional Spread Investigation of Crescent Array Surface Inspired by Slippery Zone of Nepenthes

Xian Jing, Wenfang Si, Jie Sun, Jiakang Zhou, Jieqiong Lin, Baojun Yu, Mingming Lu

Summary: This study utilized two-photon polymerization technology to measure the surface topography of crescent arrays in the Nepenthes slippery zone, proposing an outside-in scanning method to address issues in bionic crescent array surface fabrication. It systematically investigated the geometric parameters of BCAS and used perfluorinated polyether oil and fluorocarbon solvent to enhance hydrophobicity. Additionally, anisotropic wetting research was conducted, revealing the effects of offset and outer-inner radius ratio on contact angle differences and observing spreading and pinning phenomena caused by droplet anisotropic wetting.

ADVANCED MATERIALS INTERFACES (2022)

Article Chemistry, Analytical

Finite Element Investigation on Cutting Force and Residual Stress in 3D Elliptical Vibration Cutting Ti6Al4V

Shiyu Li, Jinguo Han, Haiqiang Yu, Jinhui Wang, Mingming Lu, Yebing Tian, Jieqiong Lin

Summary: This paper adopts the finite element method to study the cutting force and residual stress of titanium alloy in elliptical vibration cutting. The study finds that cutting speed, vibration amplitude, vibration frequency, and depth of cut have significant effects on the principal cutting force. Furthermore, the 3D EVC method can easily generate a compressive stress layer near the machined surface, which improves the working performance of the workpiece.

MICROMACHINES (2022)

Article Engineering, Electrical & Electronic

Decoupling Control of an Aviation Remote Sensing Stabilization Platform Based on a Cerebellar Model Articulation Controller

Tonghuan Ran, Guangfeng Shi, Jieqiong Lin, Linghe Meng

Summary: In order to obtain high-resolution and high-precision images, an aviation remote sensing stabilization platform (ARSSP) is used to isolate unpredictable aerial camera movements. However, nonlinear interferences in the ARSSP system, such as interaxle coupling interference, adversely affect the imaging quality. To address this problem, a dynamic model of moment coupling between shafts is derived and a nonlinear cross feedback decoupling scheme is adopted. The results show that the SMC-CMAC significantly reduces the interaxle coupling effect and nonlinear interference, resulting in improved tracking performance of the ARSSP system.

MACHINES (2023)

Review Engineering, Mechanical

A Review on Magnetorheological Jet Polishing Technique for Microstructured Functional Surfaces

Dunlan Song, Hongguang Du, Jieqiong Lin, Xiaoqin Zhou, Rongqi Wang

Summary: The magnetorheological jet polishing (MJP) technique is a revolutionary flexible contact polishing approach suitable for the smooth and ultra-smooth machining of functional surfaces with tiny or microstructures. It does not require machine tool accuracy and offers advantages such as high efficiency, minimal surface damage, great surface shape adaptation, and superior material removal process selectivity.

LUBRICANTS (2022)

Article Engineering, Mechanical

Parameter tuning of robust adaptive fuzzy controller for 3D elliptical vibration-assisted cutting

Yongsheng Du, Mingming Lu, Hao Wang, Jiakang Zhou, Jieqiong Lin

Summary: The study utilizes a glowworm algorithm to optimize the parameters of a robust adaptive fuzzy controller in an EVC system, achieving optimal control accuracy through simulation and closed-loop testing experiments. Results show a significant reduction in surface roughness value of workpieces cut with the optimal controller parameters, verifying the effectiveness of the optimization.

MECHANICAL SCIENCES (2021)

Article Engineering, Manufacturing

Non-resonant 3D Elliptical Vibration Cutting Induced Submicron Grating Coloring

Jianzhong Chen, Mingming Lu, Jieqiong Lin, Jiakang Zhou, Xifeng Fu, Xiaoqin Zhou

Summary: This paper proposes a grating coloring manufacturing method based on three-dimensional elliptical vibration cutting and non-resonant piezoelectric actuator, and establishes an effective cutting depth model. The nonlinear interaction of machining parameters on the geometry of the grating was analyzed, and experimental results were in agreement with the theory.

INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING (2021)

No Data Available