Rapid synthesis of dielectric tantalum-based oxynitrides

Published 2019 View Full Article

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Title
Rapid synthesis of dielectric tantalum-based oxynitrides
Authors
Keywords
-
Journal
MATERIALS & DESIGN
Volume 187, Issue -, Pages 108416
Publisher
Elsevier BV
Online
2019-12-11
DOI
10.1016/j.matdes.2019.108416

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