Point-defect engineering of MoN/TaN superlattice films: A first-principles and experimental study

Published 2019 View Full Article

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Title
Point-defect engineering of MoN/TaN superlattice films: A first-principles and experimental study
Authors
Keywords
-
Journal
MATERIALS & DESIGN
Volume 186, Issue -, Pages 108211
Publisher
Elsevier BV
Online
2019-10-25
DOI
10.1016/j.matdes.2019.108211

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