Journal
MICROMACHINES
Volume 11, Issue 1, Pages -Publisher
MDPI
DOI: 10.3390/mi11010024
Keywords
dual-sensor system; microelectromechanical systems; metal oxide nanocomposite; noxious gas mixture
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Microelectronic gas-sensor devices were developed for the detection of carbon monoxide (CO), nitrogen dioxides (NO2), ammonia (NH3) and formaldehyde (HCHO), and their gas-sensing characteristics in six different binary gas systems were examined using pattern-recognition methods. Four nanosized gas-sensing materials for these target gases, i.e., Pd-SnO2 for CO, In2O3 for NOX, Ru-WO3 for NH3, and SnO2-ZnO for HCHO, were synthesized using a sol-gel method, and sensor devices were fabricated using a microsensor platform. Principal component analysis of the experimental data from the microelectromechanical systems gas-sensor arrays under exposure to single gases and their mixtures indicated that identification of each individual gas in the mixture was successful. Additionally, the gas-sensing behavior toward the mixed gas indicated that the traditional adsorption and desorption mechanism of the n-type metal oxide semiconductor (MOS) governs the sensing mechanism of the mixed gas systems.
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