Opto-electrical properties and internal stress in Al:ZnO thin films deposited by direct current reactive sputtering

Title
Opto-electrical properties and internal stress in Al:ZnO thin films deposited by direct current reactive sputtering
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 695, Issue -, Pages 137760
Publisher
Elsevier BV
Online
2019-12-17
DOI
10.1016/j.tsf.2019.137760

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