Anomaly Detections for Manufacturing Systems Based on Sensor Data—Insights into Two Challenging Real-World Production Settings

An Online Virtual Metrology Model With Sample Selection for the Tracking of Dynamic Manufacturing Processes With Slow Drift

(2019) Jianshe Feng et al.   IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING

Techniques and Emerging Trends for State of the Art Equipment Maintenance Systems—A Bibliometric Analysis

(2018) Burkhard Hoppenstedt et al.   Applied Sciences-Basel

Understanding Data Heterogeneity in the Context of Cyber-Physical Systems Integration

(2017) Vaclav Jirkovsky et al.   IEEE Transactions on Industrial Informatics

Unsupervised real-time anomaly detection for streaming data

(2017) Subutai Ahmad et al.   NEUROCOMPUTING

Big Data Analytics for Smart Manufacturing: Case Studies in Semiconductor Manufacturing

(2017) et al.   Processes

Online tree-based ensembles and option trees for regression on evolving data streams

(2015) Elena Ikonomovska et al.   NEUROCOMPUTING

Robust principal component analysis?

(2011) Emmanuel J. Candès et al.   JOURNAL OF THE ACM

Optimal Preventive Maintenance Scheduling in Semiconductor Manufacturing Systems: Software Tool and Simulation Case Studies

(2010) J A Ramírez-Hernández et al.   IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING

Anomaly detection in streaming environmental sensor data: A data-driven modeling approach

(2009) David J. Hill et al.   ENVIRONMENTAL MODELLING & SOFTWARE

Real-time Bayesian anomaly detection in streaming environmental data

(2009) David J. Hill et al.   WATER RESOURCES RESEARCH