Direct bonding of high dielectric oxides for high-performance transistor applications

Published 2019 View Full Article

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Title
Direct bonding of high dielectric oxides for high-performance transistor applications
Authors
Keywords
-
Journal
SCRIPTA MATERIALIA
Volume 178, Issue -, Pages 307-312
Publisher
Elsevier BV
Online
2019-12-04
DOI
10.1016/j.scriptamat.2019.11.055

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