Direct bonding of LiNbO3 and SiC wafers at room temperature

Published 2019 View Full Article

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Title
Direct bonding of LiNbO3 and SiC wafers at room temperature
Authors
Keywords
-
Journal
SCRIPTA MATERIALIA
Volume 174, Issue -, Pages 58-61
Publisher
Elsevier BV
Online
2019-09-01
DOI
10.1016/j.scriptamat.2019.08.027

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