Trajectory planning of optical polishing based on optimized implementation of dwell time

Published 2019 View Full Article

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Title
Trajectory planning of optical polishing based on optimized implementation of dwell time
Authors
Keywords
-
Journal
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
Volume 62, Issue -, Pages 223-231
Publisher
Elsevier BV
Online
2019-12-13
DOI
10.1016/j.precisioneng.2019.12.006

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