Polydimethylsiloxane as polymeric protective coating for fabrication of ultra-thin chips

Published 2019 View Full Article

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Title
Polydimethylsiloxane as polymeric protective coating for fabrication of ultra-thin chips
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 221, Issue -, Pages 111157
Publisher
Elsevier BV
Online
2019-10-24
DOI
10.1016/j.mee.2019.111157

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