Effect of forming gas annealing on hydrogen content and surface morphology of titanium oxide coated crystalline silicon heterocontacts

Published 2020 View Full Article

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Title
Effect of forming gas annealing on hydrogen content and surface morphology of titanium oxide coated crystalline silicon heterocontacts
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 38, Issue 2, Pages 022415
Publisher
American Vacuum Society
Online
2020-02-18
DOI
10.1116/1.5134719

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