Chemically vapor deposited polymer nanolayers for rapid and controlled permeation of molecules and ions

Published 2020 View Full Article

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Title
Chemically vapor deposited polymer nanolayers for rapid and controlled permeation of molecules and ions
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 38, Issue 2, Pages 020801
Publisher
American Vacuum Society
Online
2020-01-07
DOI
10.1116/1.5132851

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