Demonstration of 1200 V / 1.4 mΩ cm2 vertical GaN planar MOSFET fabricated by an all ion implantation process

Title
Demonstration of 1200 V / 1.4 mΩ cm2 vertical GaN planar MOSFET fabricated by an all ion implantation process
Authors
Keywords
-
Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume -, Issue -, Pages -
Publisher
Japan Society of Applied Physics
Online
2019-12-19
DOI
10.7567/1347-4065/ab6347

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