4.6 Article

A non-volatile AND gate based on Al2O3/HfO2/Al2O3 charge-trap stack for in-situ storage applications

Journal

SCIENCE BULLETIN
Volume 64, Issue 20, Pages 1518-1524

Publisher

ELSEVIER
DOI: 10.1016/j.scib.2019.08.012

Keywords

AND gate; Non-volatile memory; Charge-trap gate stack; In-situ memory

Funding

  1. National Natural Science Foundation of China [61622401, 61851402, 61734003]
  2. National Key Research and Development Program [2017YFB0405600]
  3. Shanghai Education Development Foundation
  4. Shanghai Municipal Education Commission Shuguang Program [18SG01]
  5. Shanghai Municipal Science and Technology Commission [18JC1410300]

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The emergence of two-dimensional (2D) materials has inspired academia in microelectronics to find a novel device structure to offer a potential technological route for increasing energy efficiency and processing speed for data storage and computing at transistor level. Devices based on 2D materials include logic gates and memories, each with their own unique features. However, integrating logic function and memory into a single device has barely been studied. Here, we report a non-volatile AND gate based on Al2O3/HfO2/Al2O3 charge-trap stack. The device can store charges after completing logic operation. The ratio of high and low current states during logic operations can exceed 10(5). The output current states during the logic and memory operations still have a two orders of magnitude distinction after 800 s, indicating that this device possesses the non-volatile characteristic. The device has potential applications for in-situ memory applications, which makes it a possible candidate to break the memory wall at transistor level. (C) 2019 Science China Press. Published by Elsevier B.V. and Science China Press. All rights reserved.

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