On the electrical properties of sputter deposited thin films: The role of energy and impurity flux

Published 2019 View Full Article

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Title
On the electrical properties of sputter deposited thin films: The role of energy and impurity flux
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 690, Issue -, Pages 137540
Publisher
Elsevier BV
Online
2019-09-07
DOI
10.1016/j.tsf.2019.137540

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