Quality factor improvement of piezoelectric MEMS resonator by the conjunction of frame structure and phononic crystals

Published 2019 View Full Article

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Title
Quality factor improvement of piezoelectric MEMS resonator by the conjunction of frame structure and phononic crystals
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 297, Issue -, Pages 111541
Publisher
Elsevier BV
Online
2019-08-05
DOI
10.1016/j.sna.2019.111541

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