☆ 4.4 Article

A study on the nucleation and MPCVD growth of thin, dense, and contiguous nanocrystalline diamond films on bare and Si3N4-coated N-polar GaN

SEMICONDUCTOR SCIENCE AND TECHNOLOGY (2019)

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SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 35, Issue 1, Pages 015003

Publisher

IOP Publishing
DOI: 10.1088/1361-6641/ab4f16

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Engineering, Electrical & Electronic

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