Nano–opto-electro-mechanical switches operated at CMOS-level voltages
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Title
Nano–opto-electro-mechanical switches operated at CMOS-level voltages
Authors
Keywords
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Journal
SCIENCE
Volume 366, Issue 6467, Pages 860-864
Publisher
American Association for the Advancement of Science (AAAS)
Online
2019-11-15
DOI
10.1126/science.aay8645
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