Argon metastable and resonant level densities in Ar and Ar/Cl2 discharges used for the processing of bulk niobium
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Title
Argon metastable and resonant level densities in Ar and Ar/Cl2 discharges used for the processing of bulk niobium
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 126, Issue 10, Pages 103302
Publisher
AIP Publishing
Online
2019-09-12
DOI
10.1063/1.5115043
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