Hydrophilic direct bonding of diamond (111) substrate using treatment with H2SO4/H2O2

Published 2019 View Full Article

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Title
Hydrophilic direct bonding of diamond (111) substrate using treatment with H2SO4/H2O2
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 59, Issue SB, Pages SBBA01
Publisher
Japan Society of Applied Physics
Online
2019-10-10
DOI
10.7567/1347-4065/ab4c87

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