Kalman-Filtering-Based Iterative Feedforward Tuning in Presence of Stochastic Noise: With Application to a Wafer Stage

Published 2019 View Full Article

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Title
Kalman-Filtering-Based Iterative Feedforward Tuning in Presence of Stochastic Noise: With Application to a Wafer Stage
Authors
Keywords
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Journal
IEEE Transactions on Industrial Informatics
Volume 15, Issue 11, Pages 5816-5826
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2019-03-28
DOI
10.1109/tii.2019.2906331

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