Diamond-like carbon coatings deposited by deep oscillation magnetron sputtering in Ar-Ne discharges

Title
Diamond-like carbon coatings deposited by deep oscillation magnetron sputtering in Ar-Ne discharges
Authors
Keywords
-
Journal
DIAMOND AND RELATED MATERIALS
Volume 98, Issue -, Pages 107521
Publisher
Elsevier BV
Online
2019-08-22
DOI
10.1016/j.diamond.2019.107521

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