Low-Temperature Phase-Controlled Synthesis of Titanium Di- and Tri-sulfide by Atomic Layer Deposition

Published 2019 View Full Article

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Title
Low-Temperature Phase-Controlled Synthesis of Titanium Di- and Tri-sulfide by Atomic Layer Deposition
Authors
Keywords
-
Journal
CHEMISTRY OF MATERIALS
Volume 31, Issue 22, Pages 9354-9362
Publisher
American Chemical Society (ACS)
Online
2019-10-29
DOI
10.1021/acs.chemmater.9b02895

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