Amorphous IGZO TFT with High Mobility of ∼70 cm2/(V s) via Vertical Dimension Control Using PEALD

Published 2019 View Full Article

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Title
Amorphous IGZO TFT with High Mobility of ∼70 cm2/(V s) via Vertical Dimension Control Using PEALD
Authors
Keywords
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Journal
ACS Applied Materials & Interfaces
Volume 11, Issue 43, Pages 40300-40309
Publisher
American Chemical Society (ACS)
Online
2019-10-04
DOI
10.1021/acsami.9b14310

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