Experimental investigation on the ultrasonically assisted single-sided lapping of monocrystalline SiC substrate

Published 2019 View Full Article

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Title
Experimental investigation on the ultrasonically assisted single-sided lapping of monocrystalline SiC substrate
Authors
Keywords
Monocrystalline SiC, Ultrasonically assisted lapping, Grey-Taguchi method, Process parameters
Journal
Journal of Manufacturing Processes
Volume 44, Issue -, Pages 299-308
Publisher
Elsevier BV
Online
2019-06-23
DOI
10.1016/j.jmapro.2019.06.008

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