Studying dopant diffusion from Poly-Si passivating contacts

Published 2019 View Full Article

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Title
Studying dopant diffusion from Poly-Si passivating contacts
Authors
Keywords
TOPCon, Poly-Si passivating contacts, Dopant diffusion, Plasmaoxidation, Numerical simulation
Journal
SOLAR ENERGY MATERIALS AND SOLAR CELLS
Volume 200, Issue -, Pages 109978
Publisher
Elsevier BV
Online
2019-06-08
DOI
10.1016/j.solmat.2019.109978

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