Recent advances in non-contact force sensors used for micro/nano manipulation

Published 2019 View Full Article

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Title
Recent advances in non-contact force sensors used for micro/nano manipulation
Authors
Keywords
Micro/nano manipulation systems, Micro-force sensors, Optical fiber sensors
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 296, Issue -, Pages 155-177
Publisher
Elsevier BV
Online
2019-07-09
DOI
10.1016/j.sna.2019.07.007

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