Silicon microheater based low-power full-range methane sensing device

Published 2019 View Full Article

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Title
Silicon microheater based low-power full-range methane sensing device
Authors
Keywords
Methane sensor, Full concentration range, Silicon microheater, High temperature, Low power
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 295, Issue -, Pages 70-74
Publisher
Elsevier BV
Online
2019-05-24
DOI
10.1016/j.sna.2019.05.039

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