Journal
SENSORS
Volume 19, Issue 16, Pages -Publisher
MDPI
DOI: 10.3390/s19163560
Keywords
Pd-Ni alloy thin-film; hydrogen sensor; surface acoustic wave; working stability; differential oscillation loop
Funding
- National Natural Science Foundation of China [11774381, U1837209]
- Key Research Program of the Chinese Academy of Sciences [QYZDY-SSW-JSC007]
Ask authors/readers for more resources
A Pd-Ni alloy thin-film coated surface acoustic wave (SAW) device is proposed for sensing hydrogen. The Pd-Ni thin-film was sputtered onto the SAW propagation path of a SAW device with a delay line pattern to build the chip-sized hydrogen sensor. The prepared sensor chip was characterized by employing a differential oscillation loop. The effect of the Pd-Ni film thickness on sensing performance was also evaluated, and optimal parameters were determined, allowing for fast response and high sensitivity. Excellent working stability (detection error of 3.7% in half a year), high sensitivity (21.3 kHz/%), and fast response (less than 10 s) were achieved from the 40 nm Pd-Ni alloy thin-film coated sensing device.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available