Suspended Graphene Membranes with Attached Silicon Proof Masses as Piezoresistive Nanoelectromechanical Systems Accelerometers

Title
Suspended Graphene Membranes with Attached Silicon Proof Masses as Piezoresistive Nanoelectromechanical Systems Accelerometers
Authors
Keywords
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Journal
NANO LETTERS
Volume 19, Issue 10, Pages 6788-6799
Publisher
American Chemical Society (ACS)
Online
2019-09-04
DOI
10.1021/acs.nanolett.9b01759

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