Fabrication of InZnSiO/Ag/InZnSiO transparence flexible heater on polymer substrate by continuous roll-to-roll sputtering advanced technology

Published 2019 View Full Article

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Title
Fabrication of InZnSiO/Ag/InZnSiO transparence flexible heater on polymer substrate by continuous roll-to-roll sputtering advanced technology
Authors
Keywords
InZnSiO/Ag/InZnSiO, Transparence heater, Flexible film heater, Roll-to-roll
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 99, Issue -, Pages 1-7
Publisher
Elsevier BV
Online
2019-04-12
DOI
10.1016/j.mssp.2019.04.008

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