Temperature field modeling and cut formation in laser micromachining of silicon in ice layer

Published 2019 View Full Article

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Title
Temperature field modeling and cut formation in laser micromachining of silicon in ice layer
Authors
Keywords
Laser, Ice, Micromachining, Silicon, Modeling
Journal
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY
Volume 271, Issue -, Pages 202-213
Publisher
Elsevier BV
Online
2019-04-04
DOI
10.1016/j.jmatprotec.2019.04.006

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