High transmittance β-Ga2O3 thin films deposited by magnetron sputtering and post-annealing for solar-blind ultraviolet photodetector

Published 2019 View Full Article

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Title
High transmittance β-Ga2O3 thin films deposited by magnetron sputtering and post-annealing for solar-blind ultraviolet photodetector
Authors
Keywords
Monoclinic Ga, 2, O, 3, Thin films, High transmittance, Solar-blind photodetector
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 803, Issue -, Pages 9-15
Publisher
Elsevier BV
Online
2019-06-19
DOI
10.1016/j.jallcom.2019.06.224

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