AdaBalGAN: An Improved Generative Adversarial Network With Imbalanced Learning for Wafer Defective Pattern Recognition

Title
AdaBalGAN: An Improved Generative Adversarial Network With Imbalanced Learning for Wafer Defective Pattern Recognition
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Volume 32, Issue 3, Pages 310-319
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2019-07-19
DOI
10.1109/tsm.2019.2925361

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