Diagnostic study of argon and oxygen mixtures in dual-frequency capacitively coupled plasmas using quadrupole mass spectrometer

Published 2019 View Full Article

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Title
Diagnostic study of argon and oxygen mixtures in dual-frequency capacitively coupled plasmas using quadrupole mass spectrometer
Authors
Keywords
Dual frequency capacitively coupled plasma, Quadrupole mass spectrometer, Ion energy distribution, Average energy
Journal
CHEMICAL PHYSICS LETTERS
Volume 730, Issue -, Pages 472-477
Publisher
Elsevier BV
Online
2019-06-18
DOI
10.1016/j.cplett.2019.06.044

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