Passivation improvement of nitric acid oxide by ozone post-treatment for tunnel oxide passivated contacts silicon solar cells

Published 2019 View Full Article

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Title
Passivation improvement of nitric acid oxide by ozone post-treatment for tunnel oxide passivated contacts silicon solar cells
Authors
Keywords
Ozone oxide, Tunnel oxide, Passivation, Diffusion furnace, Si solar cell, Sub-oxide
Journal
APPLIED SURFACE SCIENCE
Volume 489, Issue -, Pages 330-335
Publisher
Elsevier BV
Online
2019-06-02
DOI
10.1016/j.apsusc.2019.05.369

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