Fractal analysis of hillocks: A case of RF sputtered aluminum thin films

Published 2019 View Full Article

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Title
Fractal analysis of hillocks: A case of RF sputtered aluminum thin films
Authors
Keywords
Aluminum thin films, Hillocks, Fractal dimension, Image processing, Multifractal, Sputtering
Journal
APPLIED SURFACE SCIENCE
Volume 489, Issue -, Pages 614-623
Publisher
Elsevier BV
Online
2019-06-05
DOI
10.1016/j.apsusc.2019.05.340

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