Journal
APPLIED PHYSICS LETTERS
Volume 115, Issue 12, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.5116677
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Funding
- NASA STTR grant on hybrid gas sensors
- Virginia Microelectronics Consortium (VMEC) research seed grant
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Hybrid gas sensors based on TiO2 functionalized gallium nitride nanowires have been prepared by nanofabrication and comprehensively studied for high-responsivity applications. The devices exhibited a high responsivity (25%) to 500 ppm NO2 assisted with ultraviolet illumination at room temperature. The thickness and doping concentration of TiO2 were engineered to improve the transducer function. The result indicated that an excellent n-type response can be stably obtained for a doping range from 1 x 10(17) cm(-3) to 1 x 10(19) cm(-3). The TiO2 thickness and doping concentration can be further fine-tuned to achieve optimal performance. In addition, a comprehensive device simulation was carried out to understand the device operation and gain insight for optimizing the device performance.
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