4.8 Article

Utilizing a NaOH Promoter to Achieve Large Single-Domain Monolayer WS2 Films via Modified Chemical Vapor Deposition

Journal

ACS APPLIED MATERIALS & INTERFACES
Volume 11, Issue 38, Pages 35238-35246

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/acsami.9b12516

Keywords

WS2; chemical vapor deposition; NaOH promoter; transistor; photodetector

Funding

  1. National Natural Science Foundation of China [51672229, 61605024, 61775031]
  2. Fundamental Research Funds for the Central Universities [ZYGX2018J056]
  3. Research Grants Council of Hong Kong SAR, China [T42103/16-N, CityU 11204618]
  4. Science Technology and Innovation Committee of Shenzhen Municipality [JCYJ20170818095520778]
  5. Shenzhen Research Institute, City University of Hong Kong
  6. UESTC Foundation for the Academic Newcomers Award

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Because of their fascinating properties, two-dimensional (2D) nanomaterials have attracted a lot of attention for developing next-generation electronics and optoelectronics. However, there is still a lack of cost-effective, highly reproducible, and controllable synthesis methods for developing high-quality semiconducting 2D monolayers with a sufficiently large single-domain size. Here, utilizing a NaOH promoter and W foils as the W source, we have successfully achieved the fabrication of ultralarge single-domain monolayer WS, films via a modified chemical vapor deposition method. With the proper introduction of a NaOH promoter, the single-domain size of monolayer WS2 can be increased to 550 ym, while the WS2 flakes can be well controlled by simply varying the growth duration and oxygen concentration in the carrier gas. Importantly, when they are fabricated into global backgated transistors, WS2 devices exhibit respectable peak electron mobility up to 1.21 cm(2)V(-1 )s(-1), which is comparable to those of many state-of-the-art W-2 transistors. Photodetectors based on these single-domain WS, monolayers give an impressive photodetection performance with a maximum responsivity of 3.2 mA W-1. All these findings do not only provide a cost-effective platform for the synthesis of high-quality large single-domain 2D nanomaterials, but also facilitate their excellent intrinsic material properties for the next-generation electronic and optoelectronic devices.

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