Study on micro-grinding quality in micro-grinding tool for single crystal silicon

Published 2019 View Full Article

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Title
Study on micro-grinding quality in micro-grinding tool for single crystal silicon
Authors
Keywords
Micro-grinding, Micro-grinding tools, Single crystal silicon
Journal
Journal of Manufacturing Processes
Volume 42, Issue -, Pages 246-256
Publisher
Elsevier BV
Online
2019-05-10
DOI
10.1016/j.jmapro.2019.04.030

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