Effects of carbon concentration on high-hardness plasma-polymer-fluorocarbon film deposited by mid-range frequency sputtering
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Title
Effects of carbon concentration on high-hardness plasma-polymer-fluorocarbon film deposited by mid-range frequency sputtering
Authors
Keywords
-
Journal
Scientific Reports
Volume 9, Issue 1, Pages -
Publisher
Springer Science and Business Media LLC
Online
2019-07-23
DOI
10.1038/s41598-019-46993-0
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