In-plane silicon microneedles with open capillary microfluidic networks by deep reactive ion etching and sacrificial layer based sharpening

Published 2019 View Full Article

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Title
In-plane silicon microneedles with open capillary microfluidic networks by deep reactive ion etching and sacrificial layer based sharpening
Authors
Keywords
In-plane microneedles, Deep reactive ion etching, Open microfluidic network, Capillary action
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 292, Issue -, Pages 149-157
Publisher
Elsevier BV
Online
2019-04-09
DOI
10.1016/j.sna.2019.04.008

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