4.7 Article

Flexible biconvex microlens array fabrication using combined inkjet-printing and imprint-lithography method

Journal

OPTICS AND LASER TECHNOLOGY
Volume 115, Issue -, Pages 118-124

Publisher

ELSEVIER SCI LTD
DOI: 10.1016/j.optlastec.2019.02.014

Keywords

Flexible microlens; Biconvex microlens; Inkjet-printing; Imprint-lithography

Funding

  1. National Natural Science Foundation of China [51705271, 51775288]
  2. Shandong Provincial Natural Science Foundation, China [ZR2017QEE018]
  3. Project of Shandong Province Higher Educational Science and Technology Program [J17KA032]

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Microlenses (MLs) and microlens arrays (MLAs) have been fabricated by various manufacturing methods for use in many important micro-optical applications. It is still difficult for most fabricated MLs to meet design requirements, especially in displays, image-processing, illumination, and field of view (FOV) of imaging fields. Thus, flexible biconvex MLAs are preferred. Fabrication methods of flexible biconvex MLAs are complex, time-consuming, and costly. In this paper, we show that a method combining inkjet-printing and imprint-lithography is effective in fabricating flexible biconvex MLAs. Optimal flexible biconvex MLA fabrication conditions are determined by examining the pertinent parameters, including the preparation and testing of photoresist, the principle of the composite imprint-lithography process, and the alignment of biconvex MLAs during the imprint process. Finally, the main optical characterizations of flexible biconvex MLAs are tested, and the results indicate good optical quality. The results of the current study demonstrate that flexible biconvex MLAs can be used for the display and FOV of imaging fields.

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