Atomic insight into tribochemical wear mechanism of silicon at the Si/SiO 2 interface in aqueous environment: Molecular dynamics simulations using ReaxFF reactive force field

Title
Atomic insight into tribochemical wear mechanism of silicon at the Si/SiO 2 interface in aqueous environment: Molecular dynamics simulations using ReaxFF reactive force field
Authors
Keywords
Tribochemical wear, Si/SiO, 2, interface, Aqueous environment, MEMS, Chemical mechanical polishing, ReaxFF molecular dynamics simulation
Journal
APPLIED SURFACE SCIENCE
Volume 390, Issue -, Pages 216-223
Publisher
Elsevier BV
Online
2016-08-24
DOI
10.1016/j.apsusc.2016.08.082

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